PRODUCTS

Clean Transfer System

Atmospheric Robot

サーボモーター仕様大気用クリーンロボット
TT300A Series Servo MotorClean Transfer Robot for the atomosphere TT300A-RA

This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.

This high-speed, ultra clean robot are the flagship model in the Tazmo line.

Features

###Promoting standardization of parts and modules enables low cost product.

###Our original high-speed exchange mechanism, enables wafer exchange using half of the original time.

###New control system realizes high-speed and smooth opreation.

###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.

###For SEMI F47.Guaranteed for three years by high reliability design.

###Mapping sensor options are available. Accesses two FOUPs without tracks.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:430㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)Z:330㎜
Repeatability
XY:±0.1mm or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer detection
Vacuum sensor with digital display
Communication
RS232C,ETHERNET
Utility
Power:1φ AC200V~230V 5A 1lineVacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.35kgController(MCQ):Appox.10kg
サーボモーター仕様大気用クリーンロボット
TT300A Series Servo MotorClean Transfer Robot for the atomosphere TT300A-WA

This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.

This high-speed, ultra clean robot are the flagship model in the Tazmo line.

Features

###Promoting standardization of parts and modules enables low cost product.

###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.

###For SEMI F47.

###Guaranteed for three years by high reliability design.

###Mapping sensor options are available.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:346㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)Z:330㎜
Repeatability
R:±0.1mm or less(3σ)T:±0.02deg or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer hold check
Vacuum sensor with digital display
Communication
RS232C,ETHERNET
Utility
Power:1φ AC200V~230V 5A 1lineVacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.35kgController(MCQ):Appox.10kg
サーボモーター仕様大気用クリーンロボット
TT300A Series Servo MotorClean Transfer Robot for the atomosphere TT300A-WB

This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.

This high-speed, ultra clean robot are the flagship model in the Tazmo line.

Features

###Promoting standardization of parts and modules enables low cost product.

###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.

###For SEMI F47.Guaranteed for three years by high reliability design.

###Mapping sensor options are available.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:250㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)Z:330㎜
Repeatability
R:±0.1mm or less(3σ)T:±0.02deg or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer detection
Vacuum sensor with digital display
Communication
RS232C,ETHERNET
Utility
Power:1φ AC200V~230V 5A 1lineVacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.34kgController(MCQ):Appox.10kg
サーボモーター仕様大気用クリーンロボット
TT300A Series Servo MotorClean Transfer Robot for the atomosphere TT300A-SA

This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.

This high-speed, ultra clean robot are the flagship model in the Tazmo line.

Features

###Promoting standardization of parts and modules enables low cost product.

###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.

###For SEMI F47.Guaranteed for three years by high reliability design.

###Mapping sensor options are available.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:346㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)Z:330㎜
Repeatability
R:±0.1mm or less(3σ)T:±0.02deg or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer detection
Vacuum sensor with digital display
Communication
RS232C,ETHERNET
Utility
Power:1φ AC200V~230V 5A 1lineVacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.35kgController(MCQ):Appox.10kg
sys-eg@tazmo.co.jp

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Sales Div.Transfer Business Unit

(086)239-5117

(086)239-5118

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