PRODUCTS

Clean Transfer System

Pre-Aligner

化合物・ガラス対応エッジホールド式
MAF-M Series For Compound Wafer,Glass WaferEdge Hold MAF-MH

This 300mm mechanically clamping wafer aligner minimizes wafer particle contamination by avoiding contact with the backside of the wafer.

Features

###Configurable for compound semiconductor wafers and glass wafers.(Please inquire for details)

###Clean alignment enabled by limiting contact to the wafer edge.

###Notch/Flat are automatically recognized, eliminating the need for host controller settings.

###Built-in controller for a compact design.

Specification

Wafer handling
φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Alignment time
8.0seconds or less(20.0seconds of less when separate chucking required)
Alignment accuracy
θ:±0.2° or less(3σ)
Wafer off-center limit
±1mm or less(Wafer offset from chuck center)
Wafer holding method
Edge hold
Wafer detection
Photo micro sensor
Communication
RS-232C(Serial Interface)
Utility
Power:DC24V±10% 3A 1lineDry air:φ6mm 0.35MPa to 0.4MPa 1line
Mass
Main body:Appox.8kg
化合物・ガラス対応エッジホールド式
MAF-M Series For Compound Wafer,Glass WaferEdge Hold MAF-MJ

This 300mm mechanically clamping wafer aligner minimizes wafer particle contamination by avoiding contact with the backside of the wafer.

Features

###Configurable for compound semiconductor wafers and glass wafers.(Please inquire us for details)

###Clean alignment enabled by limiting contact to the wafer edge.

###Notch/Flat are automatically recognized, eliminating the need for host controller settings.

###Built-in controller for a compact design.

Specification

Wafer handling
φ200mm SEMI/JEIDA standard wafer.
Alignment time
8.0seconds or less(20.0seconds of less when separate chucking required)
Alignment accuracy
θ:±0.2° or less(3σ)
Wafer off-center limit
±2mm or less(Wafer offset from chuck center)
Wafer holding method
Edge hold
Wafer detection
Photo micro sensor
Communication
RS-232C(Serial Interface)
Utility
Power:DC24V±10% 5A 1lineDry air:φ6mm 0.12MPa to 0.2MPa 1line
Mass
Main body:Appox.8kg
sys-eg@tazmo.co.jp

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Sales Div.Transfer Business Unit

(086)239-5117

(086)239-5118

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