PRODUCTS
Nanoimprint
Nanoimprint DYAD®
TIW Series Nanoimprint Fully automated mass production equipment
Φ8 / 12 inch UV curing
Features
###Fully automated mass production equipment (Coating / Drying / Alignment / Imprinting /De-molding)
###Φ8 / 12 inch UV curing
###Suitable for optical devices such as AR / VR / MR and 3D sensors
###Alignment accuracy ± 1μm
###Compatible with high aspect and slanted pattern
###Each unit and transfer robot has a proven track record in the industry
###Development of release agent free material
Specification
| Wafer size | 200mm/300mm | |
|---|---|---|
| Unit | Cassette | FOUP 25 stages |
| Transfer | Robot made by TAZMO | |
| Coating | Spin coat Max 3,000rpm |
|
| Bake | Plate Type Max 250℃ |
|
| Cool | Plate Type / Water cool type |
|
| Imprint | UV curing | |
| Remover | Release agent free | |
| Option | Imprint Accuracy ±1µm |
|
MOVIE
Sales Div. Process2 Business Unit
+81-86-239-5570
+81-86-239-5511
