PRODUCTS

Nanoimprint

Nanoimprint DYAD®

Nanoimprint
TIW Series Nanoimprint Fully automated mass production equipment

Φ8 / 12 inch UV curing

Features

###Fully automated mass production equipment (Coating / Drying / Alignment / Imprinting /De-molding)
###Φ8 / 12 inch UV curing
###Suitable for optical devices such as AR / VR / MR and 3D sensors
###Alignment accuracy ± 1μm
###Compatible with high aspect and slanted pattern
###Each unit and transfer robot has a proven track record in the industry
###Development of release agent free material

Specification

Wafer size 200mm/300mm
Unit Cassette FOUP 25 stages
Transfer Robot made by TAZMO
Coating Spin coat
Max 3,000rpm
Bake Plate Type
Max 250℃
Cool Plate Type
/ Water cool type
Imprint UV curing
Remover Release agent free
Option Imprint Accuracy
±1µm

MOVIE

lcd-eg@tazmo.co.jp

Sales Div. Process2 Business Unit

+81-86-239-5570

+81-86-239-5511