PRODUCTS
Semiconductor Manufacturing Equipment
CMP Slurry Distribution Systems
Powder oxidizer (APS) Dissolute/Distribution System Powder oxidizer (APS) Dissolute/Distribution System
Compatible with the powder oxidizer (APS) used for metal CMP process. It enables on-site dissolution of powder, concentration control and supply to CMP.
Features
###Drum cabinet with Powder dissolute function
###Supply unit is either New MX2000 or iSIS1200J
###Multiple CMPs can be plumbed from one (1) supply unit
###Original Vacuum / Pressurize technology
###Smart touch panel operation
###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging
###High maintenability such as manual operation and automatic flushing
###Concentration monitor and chemical filter applied
###Various customization such as changing bottle size of APS powder are available
###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available
Sales Div.Apprecia Business Unit
(03)6892-5123
(03)6233-9730