PRODUCTS
Clean Transfer System
Atmospheric Robot
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Single
This product is the single robot developed for PLP.
Features
###Supported up to max. 650mm square substrate.
###Supported to long stroke elevating.
Specification
- Target work
- Square subtrate 300mm～650mm
- Operating axis
- R/T/Z/S
- Range of motion
- R：Maximum arm reach 760mm（from swivel center）T：±185degZ：500mmS：2000mm
- Operating time
- R：1.8sec/Full stroke（-520mm～760mm）T：2.0sec/180degZ：1.5sec/500mmS：2.5sec/2000mm
- Repeatability
- R：±0.2mmT：±0.03degZ：±0.1mmS：±0.25mm
- Drive motor
- AC Servo Motor
- Speed control system
- S-sharped acceleration/deceleration control
- Communication
- RS232C/ETHERNET
- Utility
- Power：Supplied from controllerVAC：-80kPa or less 15L/min or moreΦ6 one-touch joint 2 systems
- Mass
- Robot Approx.110kgSlide Rail Approx.220kg
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Double
This product is the double robot developed for PLP.
Features
###Supported up to max. 650mm square substrate.
###Supported to long stroke elevating.
Specification
- Target work
- Square subtrate 300mm～650mm
- Operating axis
- R1/R2/T/Z/S
- Range of motion
- R：Maximum arm reach 760mm（from swivel center）T：±185degZ：500mmS：880mm
- Operating speed
- R1・R2：1.5sec/1175mmT：1.8sec/180degZ：2.0sec/500mmS：1.5sec/880mm
- Repeatability
- R1・R2：±0.1mm、T：±0.03degZ：±0.1mmS：±0.25mm
- Drive motor
- AC Servo Motor
- Speed control system
- S-sharped acceleration/deceleration change pulse generator control
- Communication
- RS232C/ETHERNET
- Utility
- Vacuum：-80kPa or less( Φ6×Φ4 tube one-touch joint connection ) 2systemsPower：Supplied from robot controller.
- Mass
- Robot Approx.140kgSlide Rail Approx.150kg
Sales Div.Transfer Business Unit
（086）239-5570
（086）239-5511
