PRODUCTS
Clean Transfer System
Atmospheric Robot
TT301A-RA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-RA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Our original high-speed exchange mechanism, enables wafer exchange using half of the original time.
###New control system realizes high-speed and smooth opreation.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available. Accesses two FOUPs without tracks.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：430㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
TT301A-WA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-WA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.
###Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：346㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer hold check
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
TT301A-WB Series Servo MotorClean Transfer Robot for the atomosphere TT301A-WB
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：250㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.34kgController(TT301A)：Appox.10kg
TT301A-SA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-SA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：346㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
Sales Div.Transfer Business Unit
(086)239-5117
(086)239-5118
