PRODUCTS
Semiconductor Manufacturing Equipment
CMP Slurry Distribution Systems
iSIS1200J Dual Engine Slurry Dilute/Mixing Distribution System
Each of the two cabinets of iSIS1200J has a mixing section, a supplying section and the supplying tank. It enables flexible operations such as down time-less operation with redundancy, back up for maintenance, and supplying 2 kinds of slurry by 1 system.
Features
###Drum cabinet with Powder dissolute function
###Supply unit is either New MX2000 or iSIS1200J
###Multiple CMPs can be plumbed from one (1) supply unit
###Original Vacuum / Pressurize technology
###Smart touch panel operation
###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging
###High maintenability such as manual operation and automatic flushing
###Concentration monitor and chemical filter applied
###Various customization such as changing bottle size of APS powder are available
###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available
Sales Div. Apprecia Business Unit
（03）6892-5123
（03）6233-9730
