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Semiconductor Manufacturing Equipment
Phosphoric Acid Reclamation Process Equipments
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NISON®1800 Phosphoric Acid Circulation System
NISON®1800 is well known as a proven system for phosphoric acid processes as a long seller. Analyzed mechanism of Nitride etching in order to control etching digitally, not by empirically. Which makes NISON®1800 as a de facto standard of semiconductor manufacturers
Features
###Proved process performance by long sales record.
###Stable high etching rate by boiling control of process bath
###Dual type NISON®1800 which controls 2 process baths is available
Sales Div.Apprecia Business Unit
(03)6892-5123
(03)6233-9730