PRODUCTS

Semiconductor Manufacturing Equipment

CMP Slurry Distribution SystemsPowder oxidizer (APS) Dissolute/Distribution System

スラリー希釈混合
供給システム
New MX2000 Slurry Dilute/Mixing Distribution System

New MX2000 is for CMP slurry dilution, mixture and distribution. An unique "pump-less" supply system prevnts agglomeration of abrasive particles. We have sales record of over 20 years which contributes to the realization of high availability and stable production at many semiconductor factories.

Features

###Original Vacuum / Pressurize technology

###Multiple CMPs can be plumbed from one (1) New MX2000

###Smart touch panel operation

###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging

###High maintenability such as manual operation and automatic flushing

###Various customization such as Pump supply option and 1 to 1 local supply are available

###Peripheral units such as Drum cabinets, Valve boxes, Process monitoring devices, Filters, Electorical power panels and System monitoring panels are available

デュアルエンジン スラリー
希釈混合供給システム
iSIS1200J Dual Engine Slurry Dilute/Mixing Distribution System

Each of the two cabinets of iSIS1200J has a mixing section, a supplying section and the supplying tank. It enables flexible operations such as down time-less operation with redundancy, back up for maintenance, and supplying 2 kinds of slurry by 1 system.

Features

###Drum cabinet with Powder dissolute function

###Supply unit is either New MX2000 or iSIS1200J

###Multiple CMPs can be plumbed from one (1) supply unit

###Original Vacuum / Pressurize technology

###Smart touch panel operation

###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging

###High maintenability such as manual operation and automatic flushing

###Concentration monitor and chemical filter applied

###Various customization such as changing bottle size of APS powder are available

###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available

粉体酸化剤(ASP)溶解・供給システム
Powder oxidizer (APS) Dissolute/Distribution System Powder oxidizer (APS) Dissolute/Distribution System

Compatible with the powder oxidizer (APS) used for metal CMP process. It enables on-site dissolution of powder, concentration control and supply to CMP.

Features

###Drum cabinet with Powder dissolute function

###Supply unit is either New MX2000 or iSIS1200J

###Multiple CMPs can be plumbed from one (1) supply unit

###Original Vacuum / Pressurize technology

###Smart touch panel operation

###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging

###High maintenability such as manual operation and automatic flushing

###Concentration monitor and chemical filter applied

###Various customization such as changing bottle size of APS powder are available

###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available

mla-sag@tazmo.co.jp

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Sales Div.Apprecia Business Unit

(03)6892-5123

(03)6233-9730

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