PRODUCTS
Semiconductor Manufacturing Equipment
Coater/Developer
SPR Series SPR3000
The SPR3000 series are a flagship model for mass production in BEOL, especiall thick film process.
TAZMO has spent over 40 years for Back end process, and developed High- performance process; Unti- Bake function, Tact Management function, etc.
For the configuration of the equipment, the cluster system allows to select configure the required number of processing units according to the required Coating and Developing processing and process capability.
Features
Platform
###SPR 3000 series are automatic coater/Developer for cassette to cassette , φ200mm～300mm wafer.
###For the configuration of the equipment, the cluster system allows to select configure the required number of processing units for required process capability.
Process Unit
###Coater
###Tazmo offers from the standard process for PR/PI coating ; Spin coat unit/ Bake unit/Cool unit, to the special process; Circulation spin cup unit/Spinless coating unit.
Especially, PI/PR thick film process 10～100um are our main target on PhotoLithography Process.
###Developer
###Basic paddle , spray developping process for PR/PI.
Dry Film process; temparature controling and high pressure is also available.
Operability
###Excellent operability with a GUI(Graphical User Interface)screen achieves easily edit complicated recipes.
Specification
- Substrate sizes
- φ200mm-300mm wafer
- Spin cup for Coater/Developer
- Max 4 cups
- Bake & Cool
- Max 16 units（250℃） - Anti-over bake function
- Cool plate
- Chiller(option)
- High viscosity
- Tazmo Designed Pump
- High temperature Bake
- Bake:(Max 450℃) (Option)
Sales Div.Process1 Business Unit
(086)239-5530
(086)239-5511
