PRODUCTS

Clean Transfer System

Atmospheric RobotBe compatible PLP

サーボモーター仕様大気用クリーンロボット
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Single

This product is the single robot developed for PLP.

Features

###Supported up to max. 650mm square substrate.

###Supported to long stroke elevating.

Specification

Target work
Square subtrate 300mm~650mm
Operating axis
R/T/Z/S
Range of motion
R:Maximum arm reach 760mm(from swivel center)T:±185degZ:500mmS:2000mm
Operating time
R:1.8sec/Full stroke(-520mm~760mm)T:2.0sec/180degZ:1.5sec/500mmS:2.5sec/2000mm
Repeatability
R:±0.2mmT:±0.03degZ:±0.1mmS:±0.25mm
Drive motor
AC Servo Motor
Speed control system
S-sharped acceleration/deceleration control
Communication
RS232C/ETHERNET
Utility
Power:Supplied from controllerVAC:-80kPa or less 15L/min or moreΦ6 one-touch joint 2 systems
Mass
Robot    Approx.110kgSlide Rail  Approx.220kg
サーボモーター仕様大気用クリーンロボット
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Double

This product is the double robot developed for PLP.

Features

###Supported up to max. 650mm square substrate.

###Supported to long stroke elevating.

Specification

Target work
Square subtrate 300mm~650mm
Operating axis
R1/R2/T/Z/S
Range of motion
R:Maximum arm reach 760mm(from swivel center)T:±185degZ:500mmS:880mm
Operating speed
R1・R2:1.5sec/1175mmT:1.8sec/180degZ:2.0sec/500mmS:1.5sec/880mm
Repeatability
R1・R2:±0.1mm、T:±0.03degZ:±0.1mmS:±0.25mm
Drive motor
AC Servo Motor
Speed control system
S-sharped acceleration/deceleration change pulse generator control
Communication
RS232C/ETHERNET
Utility
Vacuum:-80kPa or less( Φ6×Φ4 tube one-touch joint connection ) 2systemsPower:Supplied from robot controller.
Mass
Robot    Approx.140kgSlide Rail  Approx.150kg
sys-info@tazmo.co.jp

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Sales Div.Transfer Business Unit

(086)239-5570

(086)239-5511

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