PRODUCTS

Clean Transfer System

Atmospheric RobotBe compatible PLP

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大気用クリーンロボット
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Single

This product is the single robot developed for PLP.

Features

###Supported up to max. 650mm square substrate.

###Supported to long stroke elevating.

Specification

Target work
Square subtrate 300mm~650mm
Operating axis
R/T/Z/S
Range of motion
R:Maximum arm reach 760mm(from swivel center) T:±185deg Z:500mm S:2000mm
Operating time
R:1.8sec/Full stroke(-520mm~760mm) T:2.0sec/180deg Z:1.5sec/500mm S:2.5sec/2000mm
Repeatability
R:±0.2mm T:±0.03deg Z:±0.1mm S:±0.25mm
Drive motor
AC Servo Motor
Speed control system
S-sharped acceleration/deceleration control
Communication
RS232C/ETHERNET
Utility
Power:Supplied from controller VAC:-80kPa or less 15L/min or more Φ6 one-touch joint 2 systems
Mass
Robot    Approx.110kg Slide Rail  Approx.220kg
サーボモーター仕様
大気用クリーンロボット
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Double

This product is the double robot developed for PLP.

Features

###Supported up to max. 650mm square substrate.

###Supported to long stroke elevating.

Specification

Target work
Square subtrate 300mm~650mm
Operating axis
R1/R2/T/Z/S
Range of motion
R:Maximum arm reach 760mm(from swivel center) T:±185deg Z:500mm S:880mm
Operating speed
R1・R2:1.5sec/1175mm T:1.8sec/180deg Z:2.0sec/500mm S:1.5sec/880mm
Repeatability
R1・R2:±0.1mm、 T:±0.03deg Z:±0.1mm S:±0.25mm
Drive motor
AC Servo Motor
Speed control system
S-sharped acceleration/deceleration change pulse generator control
Communication
RS232C/ETHERNET
Utility
Vacuum:-80kPa or less ( Φ6×Φ4 tube one-touch joint connection ) 2systems Power:Supplied from robot controller.
Mass
Robot    Approx.140kg Slide Rail  Approx.150kg
lcd-eg@tazmo.co.jp

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Sales Div. Transfer Business Unit

(086)239-5570

(086)239-5511

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