PRODUCTS
Clean Transfer System
Vacuum Robot
MTP Series For High VacuumFor High Vacuum Robot MTP-BB3-2
Engineered for low vibration and low noise, this robot supports the next generation of semiconductor fabrication equipment.
Features
###Compliant with 10^-6Pa vacuum environments by adapting servo motor on all axes and unique structure.
###Contact us for materials of end effector and wafer contact portion.
###Configurable with no vertical axis(Z) specifications(Contact us for details)
###Branching arm structure minimizes the turning radius of double hands with maximum reach.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)6inch MASK
- Range of motion
- R：330㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：104㎜
- Repeatability
- XY：±0.1mm or less (3σ)Z：±0.05㎜
- Handling system
- Recess(Pocket)
- Handling hold check
- N/A
- Vacuum isolation leve
- 10＾-6Pa
- Communication
- RS-232C,RS-485(Serial Interface)Photo I/O(Parallel interface)
- Utility
- 1φ AC200V～230V 5A 1line
- Mass
- Main body:Appox.76kgController(MCQ)：Appox.16kg
MTP Series For High VacuumFor High Vacuum Robot MTP-DB3-2
Engineered for low vibration and low noise, this robot supports the next generation of semiconductor fabrication equipment.
Features
###Compliant with 10^-6Pa vacuum environments by adapting servo motor on all axes and unique structure.
###Contact us for materials of end effector and wafer contact portion.
###Configurable with no vertical axis(Z) specifications(Contact us for details)
###Branching arm structure minimizes the turning radius of double hands with maximum reach.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)6inch MASK
- Range of motion
- R：590°(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：104°
- Repeatability
- XY：±0.1mm or less (3σ)Z：±0.05mm
- Handling system
- Recess(Pocket)
- Handling hold check
- N/A
- Vacuum isolation leve
- 10＾-6Pa
- Communication
- RS-232C,RS-485(Serial Interface)Photo I/O(Parallel interface)
- Utility
- 1φ AC200V～230V 5A 1line
- Mass
- Main body:Appox.76kgController(MCQ)：Appox.16kg
MTP Series For High VacuumFor High Vacuum Robot MTP-DC5-2
Engineered for low vibration and low noise, this robot supports the next generation of semiconductor fabrication equipment.
Features
###Compliant with 10^-6Pa vacuum environments by adapting servo motor on all axes and unique structure.
###Contact us for materials of end effector and wafer contact portion.
###Configurable with no vertical axis(Z) specifications(Contact us for details)
###Free access arm stucture enables the rectangular coordinate access of vacuum chamber.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)6inch MASK
- Range of motion
- R：590㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)W1/W2：370°(±185° from Home pos)Z：160㎜
- Repeatability
- XY：±0.1mm or less (3σ)Z：±0.05㎜
- Handling system
- Recess(Pocket)
- Handling hold check
- N/A
- Vacuum isolation leve
- 10＾-6Pa
- Communication
- RS-232C(Serial Interface)
- Utility
- 1φ AC200V～230V 25A 1line
- Mass
- Main body:Appox.120kgController(MCQ)：Appox.20kg
Sales Div.Transfer Business Unit
(086)239-5117
(086)239-5118
