PRODUCTS

FPD Manufacturing Equipment

FPD/PLP CoaterTZ Series

ガントリー移動型塗布装置
TZ Series Gantry slide type Slit Coater TZS

Establish a mass production technology!

Features

###High precision discharge pump

###High precision nozzle

###Applicable to high speed coating

###Applicable to transfer robot

###Safety cover with lock mechanism

###Nozzle tip management unit

###Automatic supply system of coating liquid and cleaning liquid

###Package deal with vacuum chamber dryer

###Many delivery records

Specification

Substrate Size
Max:1,500×1,850mm
Substrate Thickness
Standard:0.4mm~1.1mm
Pump dispense Capacity
Standard:20cc,200cc
Chemical Viscosity
Standard:0.5~50cP
Coating Uniformity
Standard:<±3%(Dry thickness at 2μm)
Main body Size
To be discussed separately
エア浮上型塗布装置
TZ Series Air floating type Slit Coater TZFC

Applicable to upsizing by special technologies!

Features

###High precision discharge pump

###High precision nozzle

###Applicable to high speed coating

###Applicable to transfer robot

###Safety cover with lock mechanism

###Nozzle tip management unit

###Automatic supply system of coating liquid and cleaning liquid

###Reduce contact damage of substrate backside by air floating

###No static electricity problem by air floating

###Applicable to high speed throughput by continuous substrate input

###Package deal with large vacuum chamber dryer

###Many delivery records

Specification

Substrate Size
Max:2,940×3,370mm Min:2,200×2,500mm
Substrate Thickness
Standard:0.4mm~0.7mm
Pump dispense Capacity
Standard:200cc,400cc
Chemical Viscosity
Standard:0.5~50cP
Coating Uniformity
Standard:<±3%(Dry thickness at 2μm)
Main body Size
To be discussed separately
ガントリー移動型塗布装置
TZ Series Gantry slide type Slit Coater TZ(for PLP Coater)

Aggregated latest technologies!

Features

###High precision discharge pump

###High precision nozzle

###Applicable to transfer robot

###Safety cover with lock mechanism

###Nozzle tip management unit

###Automatic supply system of coating liquid and cleaning liquid

###Applicable to warped substrate

###Applicable to substrate surface roughness

###Saving time by job change (liquid change) specification

###Corresponding to EFEM

###Package deal with vacuum chamber dryer with hot plate, and pre-Baking equipment

###Expanding into new field

Specification

Substrate Size
Standard:510×515mm
Substrate Thickness
Standard:0.5mm~2.0mm
Pump dispense Capacity
Standard:20cc、200cc
Chemical Viscosity
Standard:0.5~200cP
Coating Uniformity
To be discussed separately
Main body Size
To be discussed separately
lcd-eg@tazmo.co.jp

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Sales Div. Process2 Business Unit

(086)239-5570

(086)239-5511

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