PRODUCTS
FPD Manufacturing Equipment
FPD/PLP Coater
TZ Series Gantry slide type Slit Coater TZS
Establish a mass production technology! (*Currently, production is temporarily suspended.)
Features
###High precision discharge pump
###High precision nozzle
###Applicable to high speed coating
###Applicable to transfer robot
###Safety cover with lock mechanism
###Nozzle tip management unit
###Automatic supply system of coating liquid and cleaning liquid
###Package deal with vacuum chamber dryer
###Many delivery records
Specification
- Substrate Size
- Max：1,500×1,850mm
- Substrate Thickness
- Standard：0.４mm～1.1mm
- Pump dispense Capacity
- Standard：20cc,200cc
- Chemical Viscosity
- Standard：0.5～50cP
- Coating Uniformity
- Standard：＜±3％（Dry thickness at 2μm）
- Main body Size
- To be discussed separately
TZ Series Air floating type Slit Coater TZFC
Applicable to upsizing by special technologies!(*Currently, production is temporarily suspended.)
Features
###High precision discharge pump
###High precision nozzle
###Applicable to high speed coating
###Applicable to transfer robot
###Safety cover with lock mechanism
###Nozzle tip management unit
###Automatic supply system of coating liquid and cleaning liquid
###Reduce contact damage of substrate backside by air floating
###No static electricity problem by air floating
###Applicable to high speed throughput by continuous substrate input
###Package deal with large vacuum chamber dryer
###Many delivery records
Specification
- Substrate Size
- Max：2,940×3,370mmMin：2,200×2,500mm
- Substrate Thickness
- Standard：0.4ｍｍ～0.7ｍｍ
- Pump dispense Capacity
- Standard：200cc,400cc
- Chemical Viscosity
- Standard：0.5～50cP
- Coating Uniformity
- Standard：＜±3％（Dry thickness at 2μm）
- Main body Size
- To be discussed separately
TZ Series Gantry slide type Slit Coater TZ（for PLP Coater）
Aggregated latest technologies!
Features
###High precision discharge pump
###High precision nozzle
###Applicable to transfer robot
###Safety cover with lock mechanism
###Nozzle tip management unit
###Automatic supply system of coating liquid and cleaning liquid
###Applicable to warped substrate
###Applicable to substrate surface roughness
###Saving time by job change (liquid change) specification
###Corresponding to EFEM
###Package deal with vacuum chamber dryer with hot plate, and pre-Baking equipment
###Expanding into new field
Specification
- Substrate Size
- Standard：510×515mm
- Substrate Thickness
- Standard：0.5ｍｍ～2.0ｍｍ
- Pump dispense Capacity
- Standard：20cc、200cc
- Chemical Viscosity
- Standard：0.5～200cP
- Coating Uniformity
- To be discussed separately
- Main body Size
- To be discussed separately
Sales Div. Process2 Business Unit
（086）239-5570
（086）239-5511
