PRODUCTS
Clean Transfer System
Atmospheric Robot
MTSR Series Stepping MotorFree Access Robot MTSR-3
This transfer robot handles wafer sizes up to 300mm.
Features
###Mapping sensor options are available.Optimized software for maximum space saving.
###Space-saving using a built-in controller.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：374㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：380㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Driver power：DC24V±5％ 10AControl power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(MCQ)：Appox.10kg
MTSR Series Stepping MotorFree Access Robot MTSR-4
This transfer robot handles wafer sizes up to 300mm.
Features
###Mapping sensor options are available.Accesses two FOUPs without tracks.
###Optimized software for maximum space saving.
###Space-saving using a built-in controller.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：470㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)W：370°(±185° from Home pos)Z：380㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Driver power：DC24V±5％ 10AControl power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(MCQ)：Appox.10kg
Sales Div.Transfer Business Unit
(086)239-5117
(086)239-5118
