PRODUCTS

Semiconductor Manufacturing Equipment

CMP Slurry Distribution SystemsPowder oxidizer (APS) Dissolute/Distribution System

粉体酸化剤(ASP)溶解・供給システム
Powder oxidizer (APS) Dissolute/Distribution System Powder oxidizer (APS) Dissolute/Distribution System

Compatible with the powder oxidizer (APS) used for metal CMP process. It enables on-site dissolution of powder, concentration control and supply to CMP.

Features

###Drum cabinet with Powder dissolute function

###Supply unit is either New MX2000 or iSIS1200J

###Multiple CMPs can be plumbed from one (1) supply unit

###Original Vacuum / Pressurize technology

###Smart touch panel operation

###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging

###High maintenability such as manual operation and automatic flushing

###Concentration monitor and chemical filter applied

###Various customization such as changing bottle size of APS powder are available

###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available

mla-sag@tazmo.co.jp

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Sales Div.Apprecia Business Unit

(03)6892-5123

(03)6233-9730

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