PRODUCTS

Semiconductor Manufacturing Equipment

Coater/DeveloperSPR Series

SPR3000
SPR Series SPR3000

The SPR3000 series are a flagship model for mass production in BEOL, especiall thick film process.

TAZMO has spent over 40 years for Back end process, and developed High- performance process; Unti- Bake function, Tact Management function, etc.

For the configuration of the equipment, the cluster system allows to select configure the required number of processing units according to the required Coating and Developing processing and process capability.

Features

Platform

###SPR 3000 series are automatic coater/Developer for cassette to cassette , φ200mm~300mm wafer.

###For the configuration of the equipment, the cluster system allows to select configure the required number of processing units for required process capability.

Process Unit

###Coater

###Tazmo offers from the standard process for PR/PI coating ; Spin coat unit/ Bake unit/Cool unit, to the special process; Circulation spin cup unit/Spinless coating unit.

Especially, PI/PR thick film process 10~100um are our main target on PhotoLithography Process.

###Developer

###Basic paddle , spray developping process for PR/PI.

Dry Film process; temparature controling and high pressure is also available.

Operability

###Excellent operability with a GUI(Graphical User Interface)screen achieves easily edit complicated recipes.

Specification

Substrate sizes
φ200mm-300mm wafer
Spin cup for Coater/Developer
Max 4 cups
Bake & Cool
Max 16 units(250℃) - Anti-over bake function
Cool plate
Chiller(option)
High viscosity
Tazmo Designed Pump
High temperature Bake
Bake:(Max 450℃) (Option)
sem-eg@tazmo.co.jp

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