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Semiconductor Manufacturing Equipment

NISON®Phosphoric Acid Reclamation Process Equipments

リン酸高温循環装置
NISON®1800 Phosphoric Acid Circulation System

NISON®1800 is well known as a proven system for phosphoric acid processes as a long seller. Analyzed mechanism of Nitride etching in order to control etching digitally, not by empirically. Which makes NISON®1800 as a de facto standard of semiconductor manufacturers

Features

###Proved process performance by long sales record.

###Stable high etching rate by boiling control of process bath

###Dual type NISON®1800 which controls 2 process baths is available

mla-sag@tazmo.co.jp

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Sales Div.Apprecia Business Unit

(03)6892-5123

(03)6233-9730

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