Semiconductor Manufacturing Equipment

Phosphoric Acid Reclamation Process Equipments

NISON®1800 Phosphoric Acid Circulation System

NISON®1800 is well known as a proven system for phosphoric acid processes as a long seller. Analyzed mechanism of Nitride etching in order to control etching digitally, not by empirically. Which makes NISON®1800 as a de facto standard of semiconductor manufacturers


###Proved process performance by long sales record.

###Stable high etching rate by boiling control of process bath

###Dual type NISON®1800 which controls 2 process baths is available

Sales Div.Apprecia Business Unit