PRODUCTS
Clean Transfer System
Atmospheric Robot
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Single
This product is the single robot developed for PLP.
Features
###Supported up to max. 650mm square substrate.
###Supported to long stroke elevating.
Specification
- Target work
- Square subtrate 300mm～650mm
- Operating axis
- R/T/Z/S
- Range of motion
- R：Maximum arm reach 760mm（from swivel center）T：±185degZ：500mmS：2000mm
- Operating time
- R：1.8sec/Full stroke（-520mm～760mm）T：2.0sec/180degZ：1.5sec/500mmS：2.5sec/2000mm
- Repeatability
- R：±0.2mmT：±0.03degZ：±0.1mmS：±0.25mm
- Drive motor
- AC Servo Motor
- Speed control system
- S-sharped acceleration/deceleration control
- Communication
- RS232C/ETHERNET
- Utility
- Power：Supplied from controllerVAC：-80kPa or less 15L/min or moreΦ6 one-touch joint 2 systems
- Mass
- Robot Approx.110kgSlide Rail Approx.220kg
Be compatible PLP Servo MotorClean Transfer Robot for the atomosphere Double
This product is the double robot developed for PLP.
Features
###Supported up to max. 650mm square substrate.
###Supported to long stroke elevating.
Specification
- Target work
- Square subtrate 300mm～650mm
- Operating axis
- R1/R2/T/Z/S
- Range of motion
- R：Maximum arm reach 760mm（from swivel center）T：±185degZ：500mmS：880mm
- Operating speed
- R1・R2：1.5sec/1175mmT：1.8sec/180degZ：2.0sec/500mmS：1.5sec/880mm
- Repeatability
- R1・R2：±0.1mm、T：±0.03degZ：±0.1mmS：±0.25mm
- Drive motor
- AC Servo Motor
- Speed control system
- S-sharped acceleration/deceleration change pulse generator control
- Communication
- RS232C/ETHERNET
- Utility
- Vacuum：-80kPa or less( Φ6×Φ4 tube one-touch joint connection ) 2systemsPower：Supplied from robot controller.
- Mass
- Robot Approx.140kgSlide Rail Approx.150kg
TT301A-RA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-RA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Our original high-speed exchange mechanism, enables wafer exchange using half of the original time.
###New control system realizes high-speed and smooth opreation.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available. Accesses two FOUPs without tracks.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：430㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
TT301A-WA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-WA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.
###Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：346㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer hold check
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
TT301A-WB Series Servo MotorClean Transfer Robot for the atomosphere TT301A-WB
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：250㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.34kgController(TT301A)：Appox.10kg
TT301A-SA Series Servo MotorClean Transfer Robot for the atomosphere TT301A-SA
This transfer robot was developed for EFEM to boost cost performance and realizes higher throughput.
This high-speed, ultra clean robot are the flagship model in the Tazmo line.
Features
###Promoting standardization of parts and modules enables low cost product.
###Compared to the conventional model, there is a reductation of 15% to the robot footprint and 50% of the controller volume.
###For SEMI F47.Guaranteed for 18 months by high reliability design.
###Mapping sensor options are available.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：346㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：330㎜
- Repeatability
- R：±0.1mm or less（3σ)T：±0.02deg or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,ETHERNET
- Utility
- Power：1φ AC200V～230V 5A 1lineVacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(TT301A)：Appox.10kg
MTE Series Servo MotorFree Access Robot MTE-E
This transfer robot handles wafer sizes up to 300mm.
This high-speed, ultra clean robot is a flagship model in the Tazmo line.
Features
###Accesses three FOUPs without tracks.
###Changer mechanism reduces wafer swap-out times.
###Mapping sensor options are available.
###The modular design of the R・T unit and elevation unit enables easy maintenance, and also supports a long vertical stroke.
###A new line up for 450mm wafer transfer with improved arm rigidity.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：590㎜(maximum arm reach,excluding end-effector)T：350°(±175° from Home pos)W：350°(±180° from Home pos)Z：330㎜P:180deg
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)P:0.02deg or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Power：1φ AC100V 7.5A 1line ：1φ AC208V 5.0A 1lineVacuum：-80 kPa or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.50kgController(MCE)：Appox.18kg
MTE Series Servo MotorFree Access Robot MTE-C
This transfer robot handles wafer sizes up to 300mm.
This high-speed, ultra clean robot is a flagship model in the Tazmo line.
Features
###Accesses two FOUPs without tracks.
###Mapping sensor options are available.
###The modular design of the R・T unit and elevation unit enables easy maintenance, and also supports a long vertical stroke.
###A new line up for 450mm wafer transfer with improved arm rigidity.
Specification
- Wafer handling
- φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：430㎜(maximum arm reach,excluding end-effector)T：350°(±175° from Home pos)W：350°(±180° from Home pos)Z：330㎜P:180deg
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)P:0.05deg or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Power：1φ AC200V~AC230V 5.0A 1lineDryair：0.5MPa 150L/min or more 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.60kgController(MCE)：Appox.18kg
MTE Series Servo MotorFree Access Robot MTE-D
This transfer robot handles wafer sizes up to 300mm.
This high-speed, ultra clean robot is a flagship model in the Tazmo line.
Features
###Accesses two FOUPs without tracks.
###Mapping sensor options are available.
###The modular design of the R・T unit and elevation unit enables easy maintenance, and also supports a long vertical stroke.
###A new line up for 450mm wafer transfer with improved arm rigidity.
Specification
- Wafer handling
- φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：480㎜(maximum arm reach,excluding end-effector)T：350°(±175° from Home pos)W：360°(±180° from Home pos)Z：330㎜P:185deg
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)P:±0.1deg or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Power：1φ AC200V~AC230V 5.0A 1lineDryair：0.5MPa 150L/min or more 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.60kgController(MCE)：Appox.18kg
MTE Series Servo MotorFree Access Robot MTE-G
This transfer robot handles wafer sizes up to 450mm.
Features
###Accesses two FOUPs without tracks.
###Mapping sensor options are available.
###The modular design of the R・T unit and elevation unit enables easy maintenance, and also supports a long vertical stroke.
###A new line up for 450mm wafer transfer with improved arm rigidity.
Specification
- Wafer handling
- φ300mm to φ450mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：590㎜(maximum arm reach,excluding end-effector)T：350°(±175° from Home pos)W：350°(±180° from Home pos)Z：300㎜P:180deg
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)P：0.05deg or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Power：1φ AC200V~AC230V 5.0A 1lineDryair：0.5MPa 150L/min or more 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.65kgController(MCE)：Appox.18kg
MTSR Series Stepping MotorFree Access Robot MTSR-3
This transfer robot handles wafer sizes up to 300mm.
Features
###Mapping sensor options are available.Optimized software for maximum space saving.
###Space-saving using a built-in controller.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：374㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)Z：380㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Driver power：DC24V±5％ 10AControl power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(MCQ)：Appox.10kg
MTSR Series Stepping MotorFree Access Robot MTSR-4
This transfer robot handles wafer sizes up to 300mm.
Features
###Mapping sensor options are available.Accesses two FOUPs without tracks.
###Optimized software for maximum space saving.
###Space-saving using a built-in controller.
Specification
- Wafer handling
- φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
- Range of motion
- R：470㎜(maximum arm reach,excluding end-effector)T：370°(±185° from Home pos)W：370°(±185° from Home pos)Z：380㎜
- Repeatability
- XY：±0.1mm or less（3σ)Z：±0.05mm or less（3σ)
- Wafer holding method
- Selectable from options
- Wafer detection
- Vacuum sensor with digital display
- Communication
- RS232C,RS-485
- Utility
- Driver power：DC24V±5％ 10AControl power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
- Mass
- Main body:Appox.35kgController(MCQ)：Appox.10kg
Sales Div.Transfer Business Unit
+81-86-239-5117
+81-86-239-5118
