PRODUCTS

Clean Transfer System

Atmospheric RobotMTSR Series

ステッピングモーター仕様フリーアクセスロボット
MTSR Series Stepping MotorFree Access Robot MTSR-3

This transfer robot handles wafer sizes up to 300mm.

Features

###Mapping sensor options are available.Optimized software for maximum space saving.

###Space-saving using a built-in controller.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:374㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)Z:380㎜
Repeatability
XY:±0.1mm or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer detection
Vacuum sensor with digital display
Communication
RS232C,RS-485
Utility
Driver power:DC24V±5% 10AControl power:DC24V±5% 3.15A Vacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.35kgController(MCQ):Appox.10kg
ステッピングモーター仕様フリーアクセスロボット
MTSR Series Stepping MotorFree Access Robot MTSR-4

This transfer robot handles wafer sizes up to 300mm.

Features

###Mapping sensor options are available.Accesses two FOUPs without tracks.

###Optimized software for maximum space saving.

###Space-saving using a built-in controller.

Specification

Wafer handling
φ100mm to φ300mm SEMI/JEIDA standard wafer.(Please inquire with regard to special wafers such as glass wafers.)
Range of motion
R:470㎜(maximum arm reach,excluding end-effector)T:370°(±185° from Home pos)W:370°(±185° from Home pos)Z:380㎜
Repeatability
XY:±0.1mm or less(3σ)Z:±0.05mm or less(3σ)
Wafer holding method
Selectable from options
Wafer detection
Vacuum sensor with digital display
Communication
RS232C,RS-485
Utility
Driver power:DC24V±5% 10AControl power:DC24V±5% 3.15A Vacuum:-80 kPa or less 15L/min or less 1line(φ6 × φ4 polyurethane tube one-touch fitting connected)
Mass
Main body:Appox.35kgController(MCQ):Appox.10kg
lcd-eg@tazmo.co.jp

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Sales Div.Transfer Business Unit

(086)239-5117

(086)239-5118

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