PRODUCTS

Semiconductor Manufacturing Equipment

CMP Slurry Distribution SystemsiSIS1200J

デュアルエンジン スラリー希釈混合供給システム
iSIS1200J Dual Engine Slurry Dilute/Mixing Distribution System

Each of the two cabinets of iSIS1200J has a mixing section, a supplying section and the supplying tank. It enables flexible operations such as down time-less operation with redundancy, back up for maintenance, and supplying 2 kinds of slurry by 1 system.

Features

###Drum cabinet with Powder dissolute function

###Supply unit is either New MX2000 or iSIS1200J

###Multiple CMPs can be plumbed from one (1) supply unit

###Original Vacuum / Pressurize technology

###Smart touch panel operation

###Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging

###High maintenability such as manual operation and automatic flushing

###Concentration monitor and chemical filter applied

###Various customization such as changing bottle size of APS powder are available

###Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available

mla-sag@tazmo.co.jp

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Sales Div.Apprecia Business Unit

(03)6892-5123

(03)6233-9730

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