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Semiconductor Manufacturing Equipment

BLEND UNITPhosphoric Acid Reclamation Process Equipments

珪素濃度調整装置
BLEND UNIT Si Concentration Adjusting System

Phosphoric acid process needs "seasoning" after entire bath chemical replacement, due to too low concentration of the silicon, which causes problem of lowering productivity. By measuring the silicon concentration in the waste chemical and blending an appropriate amount of fresh chemical, it enables to prepare Phosphoric Acid at any concentration of the dissolved silicon which can be applied to the process immediately after chemical replacement and results improvement of productivity of Phosphoric Acid process.

Features

###No need for dummy etching process (seasoning) after chemical replacement. Contributes productivity improvement and reduction of NPW cost

###Equipped originally developed silicon concentration monitor

###Measure silicon concentration in Phosphoric Acid waste and generate Phosphoric Acid at any concentration of silicon

###Automatic flushing function

###Various options are available

mla-sag@tazmo.co.jp

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Sales Div.Apprecia Business Unit

(03)6892-5123

(03)6233-9730

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